Study on human particle emission rates of cleanrooms

Due to the imperfection of the calculation method and the uncertainty of the amount of dust generated by personnel, designers often use excessive air change rates for safety, resulting in a waste of energy in the cleanroom. In order to solve this problem, this study systematically presents the calculation method of air change rate in cleanrooms based on the principle of cleanliness guarantee. Through the investigation and analysis of domestic and foreign literature, it explores the characteristics of personnel as the main body of particulate dust, obtains the particle size characteristics of personnel dust and the nonlinear law between the amount of dust and the number of personnel, compares and analyses the current dust equivalent of personnel in cleanrooms, and summarizes the main influencing factors of personnel dust in cleanrooms. It is found that with the decrease of cleanliness, the poor filtering effect of clean clothes materials, the increase of washing times and activity intensity of clean clothes, the amount of dust generated by personnel will increase. The research results can be used as a reference for the accurate design of air change rate in cleanrooms.